@article{Nguyen_Huang_Yan_Hu_Tsai_Chen_Ngai_2022, title={Safe and Efficient Disposal of Hexachlorodisilane Liquid}, volume={90}, url={https://www.cetjournal.it/index.php/cet/article/view/CET2290035}, DOI={10.3303/CET2290035}, journal={Chemical Engineering Transactions}, author={Nguyen, Thanh-Trung and Huang, Yu-Wen and Yan, Pei-Xuan and Hu, Yu-Chun and Tsai, Hsiao-Yun and Chen, Jenq-Renn and Ngai, Eugene Y.}, year={2022}, month={May}, pages={205-210}